Probe station having conductive coating added to thermal chuck insulator
AssigneeCascade Microtech, Inc.
InventorRandy Schwindt
Life of this patent
Estimating the term…
Abstract
A probe station suitable for low noise measurements includes a chuck for supporting a test device and a supporting surface for the test device. The probe station has means for controlling the temperature in the vicinity of the test device by sensing the temperature and, in response to the sensing, alternatively raising or lowering the temperature. At least two layers including a first electrically conductive layer adhered to an insulator layer are disposed between the supporting surface and the chuck. The electrically conductive layer is electrically connected to one of the chuck and supporting surface.
Claims18
A probe station suitable to reduce the level of noise in measurements comprising:
- (a) a support for supporting a test device;
- (b) means for controlling the temperature in the vicinity of said test device by sensing said temperature and, in response to said sensing, alternatively raising or lowering said temperature;
- (c) a supporting surface for said test device, said supporting surface being mounted upon said support;
- (d) at least two layers including an electrically conductive layer adhered to an electrical insulator layer;
- and
- (e) said electrically conductive layer being electrically connected to one of said support and supporting surface and said at least two layers being located between said supporting surface and said support.
A probe station suitable to reduce the level of noise in measurements comprising:
- (a) a support for supporting a test device;
- (b) means for controlling the temperature in the vicinity of said test device by sensing said temperature and, in response to said sensing, alternatively raising or lowering said temperature;
- (c) a supporting surface for said test device, said supporting surface being mounted upon said support;
- (d) a sandwich structure of at least three layers including a first electrically conductive layer adhered to one side of an electrical insulator layer and a second electrically conductive layer adhered to an opposite side of said insulator layer;
- and
- (e) said sandwich structure of said at least three layers being located between said supporting surface and said support.
Dependencies are inferred from the claim text.