Vapor phase growth system and a gas-drive motor

A vapor phase growth system comprising:

• a reactor receiving therein a susceptor;
• a tray arranged along an outer surface of the susceptor so as to be rotatable around an axis of the tray and adapted to support a wafer;
• gas-drive motor including a stator and a rotor which is rotatable with respect to the stator;
• and
• a transmission mechanism having one side coupled to the rotor and another side coupled to the tray, said transmission mechanism including:
• a rotating member having one end thereof fixed to the rotor and another end formed with a gear,
• a shaft member having one end thereof fixed to the tray, and
• a further gear fixed to another end of the shaft member and being in mesh with the gear of the rotating member.

A vapor phase growth system comprising:

• a reactor receiving therein a susceptor, said susceptor having a top wall and a peripheral wall which cooperates with the top wall to define a hollow portion;
• a tray arranged along an outer surface of the susceptor so as to be rotatable around an axis of the tray and adapted to support a wafer;
• a gas-drive motor including a stator and a rotor which is rotatable with respect to the stator, said stator and said rotor of said gas-drive motor being ring-shaped, said ring-shaped stator defining a center hole;
• a transmission mechanism having one side coupled to the rotor and another side coupled to the tray, said transmission mechanism including:
• a hollow rotating member extending along an axis of the susceptor, the hollow rotating member having one end thereof fixed to the rotor and another end formed with a ring gear, and having a hollow portion inside,
• a shaft member having one end thereof fixed to the tray and penetrating the peripheral wall of the susceptor, and
• a gear fixed to another end of the shaft member and being in mesh with the ring gear of the hollow rotating member;
• and
• a drive mechanism for rotating the susceptor, the drive mechanism having a rotating shaft extending along the axis of the susceptor through the center hole of the gas-drive motor and the respective hollow portions of the hollow rotating member and the susceptor, said rotating shaft being fixed at one end thereof to the top wall of the susceptor;
• and
• wherein the tray rotates around the axis of the susceptor as the susceptor rotates.

A vapor phase growth system comprising:

• a reactor receiving therein a susceptor;
• a tray arranged along an outer surface of the susceptor so as to be rotatable around an axis of the tray and adapted to support a wafer;
• a gas-drive motor including a stator and a rotor which is rotatable with respect to the stator;
• a transmission mechanism having one side coupled to the rotor and another side coupled to the tray;
• and
• a drive mechanism for rotating the susceptor, the drive mechanism having a rotating shaft which is movable in an axial direction of the susceptor, and wherein the stator of the gas-drive motor is fixed to the rotating shaft;
• and
• wherein the tray rotates around an axis of the susceptor as the susceptor rotates.

A vapor phase growth system comprising:

• a reactor receiving therein a susceptor;
• a tray arranged along an outer surface of the susceptor so as to be rotatable around an axis of the tray and adapted to support a wafer;
• a gas-drive motor including a stator and a rotor which is rotatable with respect to the stator;
• the stator of the gas-drive motor being formed with a rotor chamber receiving the rotor such that the rotor is liftable and rotatable with respect to the stator, a first gas passage having a first gas injection port opening in a bottom face of the rotor chamber of the stator, and a second gas passage having a second gas injection port opening in a peripheral surface of the rotor chamber of the stator;
• the rotor of the gas-drive motor having a bottom face and a peripheral surface formed with a plurality of gas receiving recesses;
• and
• a transmission mechanism having one side coupled to the rotor and another side coupled to the tray.

A gas-drive motor system comprising:

• a gas-drive motor including a stator formed with a rotor chamber and a rotor received in the rotor chamber so as to be liftable and rotatable with respect to the stator and having a bottom face and a peripheral surface formed with a plurality of gas receiving recesses, said stator being formed with a first gas passage having a first gas injection port opening in a bottom face of the rotor chamber of the stator and a second gas passage, said second gas passage including a forward rotor rotation gas injection passage having a gas injection port opening in the bottom face of the rotor chamber of the stator and a reverse rotor rotation gas injection passage having a gas injection port, said forward rotor rotation gas injection passage extending in a direction such that a gas injected from the gas injection port thereof toward a corresponding one or ones of the gas receiving recesses in the peripheral surface of the rotor acts so as to rotate the rotor in a forward direction, said reverse rotor rotation gas injection passage extending in a direction such that a gas injected from the gas injection port thereof toward a corresponding one or ones of the gas receiving recesses in the peripheral surface of the rotor acts so as to rotate the rotor in a reverse direction;
• and
• a gas supply control device for controlling supply of the gases to the forward rotor rotation gas injection passage and the reverse rotor rotation gas injection passage.