Hybrid metal/metal oxide electrodes for ferroelectric capacitors
AssigneeNorth Carolina State University
InventorsAngus I. Kingon, Husam N. Al-Shareef, Orlando H. Auciello, Ken D. Gifford, Dan J. Lichtenwalner, Rovindra Dat
Life of this patent
Estimating the term…
Abstract
Ferroelectric capacitors with hybrid electrodes including both a conducting oxide and a noble metal may be used to achieve devices having improved performance over capacitors with either platinum or ruthenium oxide electrodes. These hybrid electrode structures can improve capacitor performance both in terms of fatigue and leakage current. Accordingly, these ferroelectric capacitors with hybrid electrodes can be used as elements of an integrated circuit such as a non-volatile memory or dynamic random access memory.
Claims46
A ferroelectric capacitor comprising:
- a first layer comprising a conducting metal oxide;
- a second layer on said first layer, said second layer comprising a metal, wherein said second layer is deposited sufficiently thin to complement said first layer to improve the leakage current behavior of the capacitor and minimize polarization fatigue;
- a third layer on said second layer opposite said first layer, said third layer comprising a ferroelectric material;
- and
- a fourth layer on said third layer opposite said second layer, said fourth layer comprising a conductive material.
A ferroelectric capacitor comprising:
- a first layer comprising a metal;
- a second layer on said first layer, said second layer comprising a conductive metal oxide wherein said second layer is in the range of 150 to 200 Angstroms thick, wherein said second layer improves polarization fatigue of the capacitor without compromising leakage current;
- a third layer on said second layer opposite said first layer, said third layer comprising a ferroelectric material;
- and
- a fourth layer on said third layer opposite said second layer, said fourth layer comprising a conductive material.
A ferroelectric capacitor comprising:
- a first layer comprising a mixture of a conductive metal oxide and a noble metal;
- a second layer on said first layer, said second layer comprising a ferroelectric material;
- and
- a third layer on said second layer opposite said first layer, said third layer comprising a conductive material.
A ferroelectric capacitor comprising:
- a first layer comprising a plurality of repeating alternating interlayers, at least one of said alternating interlayers comprising a first metal, and another of said interlayers comprising one of a second metal and a conducting oxide;
- a second layer on said first layer, said second layer comprising a ferroelectric material;
- and
- a third layer on said second layer opposite said first layer, said third layer comprising a conductive material.
A ferroelectric capacitor comprising:
- a first layer comprising a metal;
- a second layer on said first layer, said second layer comprising a conductive metal oxide;
- a third layer on said second layer opposite said first layer, said third layer comprising a ferroelectric material;
- and
- a fourth layer on and in direct contact with said third layer opposite said second layer, said fourth layer comprising said conductive metal oxide.
Dependencies are inferred from the claim text.