Method of making hard, transparent amorphous hydrogenated boron nitride films
AssigneeFord Motor Company
InventorsMichael A. Tamor, William C. Vassell
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Abstract
This invention is directed to a process for providing a hard, transparent, hydrophobic film of hydrogenated boron nitride on a substrate and the film so made. The process comprises depositing the film condensation from a flux of ions generated from gaseous precursors comprising borazine, the kinetic energy of the ions being between 50 and 300 electron volts per ion. Preferably the process is plasma-enhanced chemical vapor deposition carried out in a radio frequency plasma system.
Claims8
A process for providing a hard, transparent film comprising amorphous hydrogenated boron-nitride on a substrate, said process comprising depositing said film on said substrate at a temperature of less than about 100.degree. C. by plasma-enhanced chemical vapor deposition from gaseous precursor materials comprising ammonia and borazine in a molar ratio between about 1:1 and 5:1 in a radio frequency plasma system maintained at a pressure less than 1 Torr, said substrate being maintained at a potential of between -150 and -900 volts relative to the plasma generated by the system.
Dependencies are inferred from the claim text.