Device for measuring the thickness of thin films
AssigneeNova Measuring Instruments Ltd.
InventorMoshe Finarov
Life of this patent
Estimating the term…
Abstract
A thin film thickness measuring device is disclosed. The device includes an illuminator, a receiver and a beam deflector. The illuminator provides a collimated input light beam along an input axis. The receiver includes a lens and a diaphragm having a pinhole located at a focal point of the lens and receives a collimated output light beam along an output axis parallel to the input axis. The beam deflector is translatable at least along a scanning axis parallel to the input axis. The beam deflector directs the input light beam towards a sample and the output light beam from the sample towards the receiver.
Claims7
A thickness measuring device for measuring the thickness of thin films on a sample, the device comprising:
- a stationary illuminator for providing a collimated input light beam along an input axis;
- a beam deflector for directing said input light beam towards said sample and for directing and collimating an output light beam from said sample, said beam deflector comprising a collimating lens which receives at least said output light beam and two-dimensional translation means for translating said beam deflector along a first scanning axis parallel to said input axis and along a second scanning axis perpendicular to said first scanning axis;
- and
- a stationary receiver for receiving said collimated output light beam along an output axis parallel to said input axis.
Dependencies are inferred from the claim text.