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US 5,517,048 AGranted
Pad structure with parasitic MOS transistor for use with semiconductor devices
AssigneeVLSI Technology, Inc.
InventorYasumasa Kosaka
Life of this patent
Estimating the term…
Abstract
An ESD protection device for protecting semiconductor devices from electrostatic discharge includes a metal pad of the semiconductor device, a first charge sink, and a first MOS transistor. The first MOS transistor is placed under the metal pad. The first MOS transistor is coupled as a switch between the first charge sink and the metal pad. In addition, the metal pad operates as a gate of the first MOS transistor. Upon static electricity of a high magnitude of voltage being placed on the metal pad, the first MOS transistor turns on and the static electricity is discharged to the first charge sink.
Claims11
A device on an integrated circuit, the device comprising:
- a metal pad which provides electrical connection between the integrated circuit and other apparatus;
- a first contact region of first conductivity type directly under the metal pad;
- a second contact region of first conductivity type, at least partially under the metal pad;
- material of second conductivity type between the first contact region and the second contact region;
- a first conductive connection between the metal pad and the first contact region;
- a first charge sink connected to the second contact region;
- and,
- first dielectric material placed between the first contact region and the second contact region, placement of the first dielectric material preventing direct electrical connection between the first contact region and the second contact region, wherein a channel of first conductivity type is formed from the first contact region around the first dielectric material to the second contact region when static electricity of a high magnitude of voltage is placed on the metal pad.
5 more elements
An ESD protection device for protecting semiconductor devices from electrostatic discharge comprising:
- a metal pad of the semiconductor device, the metal pad providing electrical connection between the semiconductor device and other apparatus;
- a first charge sink;
- a first MOS transistor under the metal pad of the semiconductor device, the first MOS transistor coupled as a switch between the first charge sink and the metal pad, and additionally, the metal pad operating as a gate of the first MOS transistor so that upon static electricity of a high magnitude of voltage of a first conductivity type being placed on the metal pad, the first MOS transistor turns on and the static electricity is discharged to the first charge sink, the first MOS transistor including
- first dielectric material, a first channel being formed around the first dielectric material when static electricity of a high magnitude of voltage of the first conductivity type is placed on the metal pad.
1 more element
A device on an integrated circuit, the device comprising:
- a metal pad which provides electrical connection between the integrated circuit and other apparatus;
- a first contact region of first conductivity type directly under the metal pad;
- a second contact region of first conductivity type, at least partially under the metal pad;
- material of second conductivity type between the first contact region and the second contact region;
- a first conductive connection between the metal pad and the first contact region;
- a first charge sink connected to the second contact region;
- first dielectric material between the metal pad and the material of second conductivity type, the first dielectric material being placed so that upon static electricity of a high magnitude of voltage being placed on the metal pad, a channel of first conductivity type is formed from the first contact region through the material of second conductivity type to the second contact region;
- a third contact region of second conductivity type directly under the metal pad;
- a fourth contact region of second conductivity type, at least partially under the metal pad;
- material of first conductivity type between the third contact region and the fourth contact region;
- a second conductive connection between the metal pad and the third contact region;
- a second charge sink connected to the fourth contact region;
- and,
- second dielectric material between the metal pad and the material of second conductivity type, the second dielectric material being placed so that upon static electricity of a high magnitude of voltage being placed on the metal pad, a channel of second conductivity type is formed from the third contact region through the material of first conductivity type to the fourth contact region.
11 more elements
Dependencies are inferred from the claim text.