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US 5,516,554 AGranted
Cyclic hot-filament CVD of diamond
AssigneeGeneral Electric Company
InventorSteven M. Gasworth
Life of this patent
Estimating the term…
Abstract
The steady state operating parameters of a low pressure cyclic hot-filament chemical vapor deposition process for making diamond, i.e., nucleation-growth and graphite removal, are applied as controlled sequential steps to favor nucleation and growth.
Claims8
A method for synthesizing diamond by a cyclic hot-filament chemical vapor deposition (CVD) process, comprising the steps of:
- (a) providing a first flow stream of one or more gases, at least one of which is a gas containing carbon;
- (b) providing a second flowing stream of gas isolated from said first stream and consisting essentially of a hydrogen;
- (c) rotating a substrate to expose a region of said substrate sequentially to said first and second streams on a continuing basis for diamond nucleation and growth on said region of said substrate.
Dependencies are inferred from the claim text.