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US 5,514,196 AGranted
Air cleaning apparatus
AssigneesTokyo Electron Limited, Tokyo Electron Tohoku Kabushiki Kaisha
InventorsTakashi Tanahashi, Syuji Moriya, Tsuyoshi Wakabayashi, Takenobu Matsuo
Life of this patent
Estimating the term…
Abstract
An air cleaning apparatus includes an air passage chamber having a suction port, from which air is sucked, and a discharge port from which the air sucked from the suction port is discharged, an air blower, provided in the air passage chamber, for sucking the air from the suction port into the air passage chamber and discharging the sucked air from the discharge port, and a particle removing mechanism for removing particles contained in the air sucked from the suction port, the entire body of the particle removing mechanism being formed of a material which generates little impurity gas detrimental to processing in a processing space.
Claims15
An air cleaning apparatus comprising:
- an air passage chamber having a suction port, from which air is sucked, and a discharge port from which the air sucked from the suction port is discharged;
- air blow means, provided in said air passage chamber, for sucking the air from said suction port into the air passage chamber and discharging the sucked air from said discharge port;
- and
- particle removing means for removing particles contained in the air sucked from the suction port, the entire body of said particle removing means being formed of a material which generates little impurity gas detrimental to processing in a processing space;
- wherein said particle removing means comprise:
- a filter unit constituted by a plurality of cylindrical filters each having an axially extending air feed hole in a cylindrical filtering material, said air feed hole having one end opened and the other end closed in the cylindrical filter, and an air stream restriction member disposed about at least a portion of an outer periphery of each of said cylindrical filters for restricting an air stream output about the portion of the outer periphery of each of said cylindrical filters to cause the air stream to flow to a front side of each of said cylindrical filters, and wherein said cylindrical filters are partitioned by said air stream restriction member on their lateral sides, said cylindrical filter and said air stream restriction member being formed of one selected from the group consisting of a metallic material, a ceramic material and a resin material;
- and
- guide means for guiding a gas in said air passage chamber fed from said air blow means towards the opened end of the air feed hole of each of the cylindrical filters.
5 more elements
An air cleaning apparatus comprising:
- a plurality of cylindrical filters each having an axially extending air feed hole in a cylindrical filtering material, said air feed hole having one end opened and the other end closed in the cylindrical filter, said cylindrical filter being formed of one selected from the group consisting of a metallic material, a ceramic material and a resin material;
- an air stream restriction member disposed about at least a portion of an outer periphery of each of said cylindrical filters for restricting an air stream output about the portion of the outer periphery of each of said cylindrical filters to cause the air stream to flow to a front side of each of said cylindrical filters, and wherein said cylindrical filters are partitioned by said air stream restriction member on their lateral sides, said air stream restriction member being formed of one selected from the group consisting of a metallic material, a ceramic material and a resin material;
- and
- pressure-feed means for feeding pressurized air to the opened end of the air feed hole of said cylindrical filter.
1 more element
An air cleaning filter comprising:
- a filter frame formed of a metallic material;
- and
- a filter portion, said filter portion including a plurality of cylindrical filters, and an air stream restriction member, said air stream restriction member partially disposed between adjacent cylindrical filters such that said cylindrical filters are partitioned by said air stream restriction member on their lateral sides.
A processing apparatus comprising:
- a processing unit in which an object is processed;
- a housing for housing said processing unit;
- and
- at least one air cleaning apparatus, situated within said housing, for forming an air circulation flow within said housing and removing particles in the air circulation flow,
- wherein said air cleaning apparatus comprises:
- an air passage chamber having a suction port, from which the air in said housing is sucked, and a discharge port from which the air sucked from the suction port is discharged into said housing;
- air blow means, provided in said air passage chamber, for sucking the air from said suction port into the air passage chamber and discharging the sucked air from said discharge port;
- and
- particle removing means for removing particles contained in the air sucked from the suction port, the entire body of said particle removing means being formed of a material which generates little impurity gas detrimental to processing in a processing space, said particle removing means including a plurality of cylindrical filters, and an air stream restriction member, said air stream restriction member partially disposed between adjacent cylindrical filters such that said cylindrical filters are partitioned by said air stream restriction member on their lateral sides.
6 more elements
A processing apparatus comprising:
- a processing unit in which an object is processed;
- a housing for housing said processing unit;
- and
- an air cleaning apparatus, attached to said housing, for purifying air sucked from the outside of the housing and discharging the purified air into the housing,
- wherein said air cleaning apparatus comprises:
- an air passage chamber having a suction port, through which the air outside the housing is sucked, and a discharge port from which the air sucked through the suction port is discharged into said housing;
- air blow means, provided in said air passage chamber, for sucking the air from said suction port into the air passage chamber and discharging the sucked air from said discharge port;
- and
- particle removing means for removing particles contained in the air sucked from the suction port, the entire body of said particle removing means being formed of a material which generates little impurity gas detrimental to processing in a processing space, said particle removing means including a plurality of cylindrical filters, and an air stream restriction member, said air stream restriction member partially disposed between adjacent cylindrical filters such that said cylindrical filters are partitioned by said air stream restriction member on their lateral sides.
6 more elements
Dependencies are inferred from the claim text.