Bipolar transistor with particular base structure
AssigneeNEC Corporation
InventorKiyotaka Imai
Life of this patent
Estimating the term…
Loading patent…
AssigneeNEC Corporation
InventorKiyotaka Imai
Estimating the term…
A collector layer of a first electrically conductive type is surrounded by an oxide film for separating elements. A base layer comprising an epitaxial layer of a second electrically conductive type is formed on the collector layer. A polysilicon film of the second electrically conductive type is formed at a first area of a surface of the base layer. An emitter layer of the first electrically conductive type is formed at a second area of a surface of the base layer. A base polysilicon electrode comprising of the second electrically conductive type is formed on the polysilicon film and on the oxide film for separating elements. A sidewall comprising an insulating film is formed over a lateral wall of the base polysilicon electrode and a lateral wall of the polysilicon film. An emitter polysilicon electrode of the first electrically conductive type is formed over the emitter layer and the side wall.
A bipolar transistor comprising:
Dependencies are inferred from the claim text.