Method of making ESD protection device

Abstract

An ESD protection device is disclosed having a first region of a first conductivity type. A second region, which is heavily doped, of a second conductivity type is disposed in the first region. The second region extends from the surface of the first region a first depth. A third region, which is heavily doped, of the second conductivity type, is also disposed in the first region such that the third region is separated from the second region by a portion of the surface of the first region. The third region extends from the surface of the first region a second depth less than the first depth of the second region. An insulating region is grown on a portion of the surface of the first region between the second and third regions. Furthermore, a resistive conducting region is disposed on the second region and the insulating region. A portion of the resistive conducting region extends beyond the second region for receiving an input signal.

Dependencies are inferred from the claim text.