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US 5,507,978 AGranted
Novolak containing photoresist stripper composition
AssigneeOCG Microelectronic Materials, Inc.
InventorKenji Honda
Life of this patent
Estimating the term…
Abstract
A noncorrosive photoresist composition containing: (a) 20-70% by weight of an organic polar solvent having a dipole moment of more than 3.5; (b) 70-20% by weight of selected amine compounds; (c) about 0.01% to about 1% by weight of novolak resin having a weight-average molecular weight (M.sub.w) from about 200 to about 5,000; (d) optionally 0-10% by weight of selected amino acid having a hydroxyl group; and (e) optionally 0-10% by weight of water.
Claims9
A resist stripper composition comprising:
- (a) from about 20 to about 70% by weight of an organic polar solvent having a dipole moment of more than 3.5;
- (b) from about 70 to about 20% by weight of an amine compound selected from the group consisting of compounds having the formula (I):
- ##STR5## wherein n and m are each independently an integer ranging from 0-5, inclusive;
- X is hydrogen, alkyl, or alkoxy group;
- Y is either --O-- or --NH--;
- and Z is hydrogen, --OH, or --NH.sub.2 ;
- (c) about 0.01% to about 1% by weight of novolak resin having a weight average molecular weight (M.sub.w) from about 200 to about 5,000;
- (d) optionally from about 0 to about 10% by weight of an amino acid selected from the group consisting of compounds having the formula (II):
- ##STR6## wherein n is an integer ranging from 1-3;
- R.sup.1 and R.sup.2 are each independently selected from the group consisting of hydrogen and compounds having the formula ##STR7## wherein R.sup.5, R.sup.6, and R.sup.7 are each independently selected from hydrogen, --OH, --CH.sub.2 OH, alkyl, alkoxy, phenyl, and mono-, di- or tri-hydroxy-substituted phenyl groups;
- and R.sup.3 and R.sup.4 are each independently selected from the group consisting of hydroxy and compounds having the formula (IV):
- ##STR8## wherein X', Y', and Z' are each independently selected from hydrogen, --OH, --CH.sub.2 OH, --CH.sub.2 CH.sub.2 OH, --CH.sub.2 COOH, alkyl, or alkoxy group, and at least one of them is --OH, --CH.sub.2 CH.sub.2 OH, or --CH.sub.2 OH;
- and
- (e) optionally from about 0 to about 10% by weight of water.
11 more elements
Dependencies are inferred from the claim text.