Method and apparatus for producing crystalline layers
AssigneeMax-Planck-Gesellschaft zur Forderung der Wissenshaften e.V., Berlin
InventorsElisabeth Bauser, Mitsubaru Konuma
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Abstract
A method for the formation of a layer on at least one substrate. A liquid, which contains the material for forming the layer, flows over the surface of the substrate of the substrate to be coated. A concentration gradient of the layer-forming material is produced in a direction, perpendicular to the direction of the flow of the liquid. As a result, the concentration of the layer-forming material becomes a maximum at one side of the liquid.
Claims11
A method for the formation of a layer on at least one substrate comprising the steps of bringing a liquid which contains a material for forming the layer to flow over a surface of the substrate by exerting a centrifugal force on the liquid which contains the material for forming the layer and flows over the surface of the substrate to be coated, and producing a concentration gradient of the layer-forming material in a direction, perpendicular to a direction of flow of the liquid, in such a manner, that the concentration of the layer-forming material becomes a maximum at one side of the liquid,
- wherein a flow of said liquid is subjected to a centrifugal acceleration which is higher than acceleration required to transport the liquid over the substrate.
Dependencies are inferred from the claim text.