Photosensitive compositions containing a polymer with carboxyl and hydroxyphenyl groups, a compound with multiple ethylenic unsaturation and a photo-acid generator
AssigneeKansai Paint Co., Ltd.
InventorsGenji Imai, Naozumi Iwasawa, Tsuguo Yamaoka
Life of this patent
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Abstract
A photosensitive composition which comprises, as essential components: (A) a polymer having carboxyl group(s) and hydroxyphenyl group(s), or (A') a polymer having carboxyl group(s) and (A") a polymer having hydroxyphenyl group(s), (B) a compound having at least two vinyl ether groups in the molecule, and (C) a compound which generates an acid when irradiated with an actinic ray, and which is useful as a positive type photoresist having high resolution and excellent formability of fine image pattern, a material for printing, etc.; and a process for pattern formation using said composition.
Claims9
A photosensitive composition comprising:
- (a) A polymer (A) having 0.5 to 10 equivalents of carboxyl groups per kg of said polymer (A) and at least one equivalent of hydroxyphenyl group per kg of said polymer (A), said polymer (A) having a number-average molecular weight of about 500 to about 100,000 and a glass transition temperature not lower than 0.degree. C.;
- (b) a low-molecular weight or high-molecular weight compound (B) having two to four vinyl ether groups each represented by the formula --R'--O--CH.dbd.CH.sub.2 wherein R' represents a straight-chain or branched-chain alkylene group of 1-6 carbon atoms, said compound (B) present in the composition in an amount of 5-150 parts by weight per 100 parts by weight of said polymer (A);
- and
- (c) a compound (C) which generates an acid when irradiated with an actinic ray and is selected from the group consisting of compounds of the following formulae (I) to (XIV):
- Ar.sub.2 I.sup..sym. .multidot.X.sup..sym. (I)
- wherein Ar represents an aryl group such as phenyl or the like;
- and X.sup..crclbar. represents PF.sub.6.sup..crclbar., SbF.sub.6.sup..crclbar. for AsF.sub.6.sup..crclbar.,
- Ar.sub.3 S.sup..sym. .multidot.X.sup..crclbar. (II)
- wherein Ar and X.sup..crclbar. have the same definitions as in formula (I), ##STR14## wherein R represents an alkyl group of 1-12 carbon atoms or an alkoxy group of 1-12 carbon atoms;
- n is an integer from 0 to 3;
- and X.sup..crclbar. has the same definition as in formula (I), ##STR15## wherein X.sup..crclbar. has the same definition as in formula (I), ##STR16## wherein X.sup..crclbar. has the same definition as in formula (I), ##STR17## wherein X.sup..crclbar. has the same definition as in formula (I), ##STR18## wherein X.sup..crclbar. has the same definition as in formula (I), ##STR19## wherein R.sub.1 and R.sub.2 independently represent an alkyl group of 1-12 carbon atoms or an alkoxy group of 1-12 carbon atoms, ##STR20## wherein R.sub.1 and R.sub.2 have the same definitions as in formula (IX), ##STR21## said compound (C) being present in the composition in an amount of 0.1 to 40 parts by weight per 100 parts by weight of the total of said polymer (A) and said compound (B) in the composition.
Dependencies are inferred from the claim text.