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US 5,496,491 AGranted
Organic stripping composition
AssigneeAshland Oil, Inc.
InventorsIrl E. Ward, Francis W. Michelotti
Life of this patent
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Abstract
Organic stripping composition for photoresists comprising organic polar solvents and basic amines which includes an inhibitor which forms a coordination complex with a metal.
Claims12
In a stripping composition for photoresists wherein said stripping composition comprises an organic polar solvent and a basic amine, the improvement which comprises that said composition contains about 0.5 to 10% by weight of an inhibitor which is the dissolved salt reaction product of an alkanolamine and a reactant selected from the formula consisting of:
- ##STR6## wherein X represents C, O, N, or S,
- Y represents C, O, N, or S,
- R represents --OH, --NR"R", --SR", --NO, NO.sub.2 or ##STR7## z is 0 or 1;
- R' represents --OH, --NR"R", --SR", --NO, NO.sub.2 or ##STR8## G represents H, --OH and CO.sub.2 R", lower alkyl or halo, R" represents H or lower alkyl, and
- R'" represents lower alkyl or lower alkoxy.
2 more elements
Dependencies are inferred from the claim text.