Method for the fabrication of electroluminescence device

Abstract

There is provided a method for the fabrication of electroluminescence device, comprising the steps of: forming a lower electrode with a predetermined pattern on a substrate: forming a first insulation layer on the lower electrode atop the substrate, in a state of grounding the lower electrode; forming a luminescent layer on the first insulation layer; forming a second insulation film on the luminescent layer; and forming an upper electrode with a predetermined on the second insulation layer. For formation of the first insulation layer, a ferroelectric material is deposited by a sputtering process employing a sputtering apparatus consisting broadly of a vacuum chamber and an external limiter. The transparent lower electrode is electrically connected with the external limiter and grounded through it. In this condition, the electric potential which might be generated on the first insulation layer during its formation can be controlled, thereby preventing the darkening phenomenon of the transparent lower electrode.

Dependencies are inferred from the claim text.