US 5,492,718 A · Fluid delivery apparatus and method having an infrared feedline sensor

Abstract

An apparatus for processing a layer on a workpiece includes a source of reactant fluid, a reaction chamber having a support for the workpiece and a fluid delivery apparatus for feeding an input fluid into the reaction chamber with the input fluid being utilized to process the material. An infrared sensor is adapted to cooperate with the fluid delivery apparatus for sensing the concentration of a component of the input fluid. The infrared sensor includes an infrared light source positioned to direct a beam of infrared light at an infrared light detector through the input fluid. The infrared light detector produces an electrical output signal indicative of the amount of light received by the detector and therefore not absorbed by the input fluid.

Claims16

Dependent claims

A method of processing a layer of material on a workpiece comprising:

supporting said workpiece in a reaction chamber;
feeding an input fluid from a source of reactant fluid into said reaction chamber to form said material;
situating an infrared sensor between said reaction chamber and said source of reactant fluid for sensing the concentration of a component of said input fluid by directing a beam of infrared light through a direct feed of all of said input fluid being fed from said source of reactant fluid to said reaction chamber, detecting the amount of the beam of infrared light not absorbed by said input fluid, and producing an electrical output signal indicative of said non-absorbed infrared light for sensing the concentration of a component of the input fluid delivered to said reaction chamber.

Dependencies are inferred from the claim text.

Fluid delivery apparatus and method having an infrared feedline sensor

Life of this patent

Fluid delivery apparatus and method having an infrared feedline sensor

Life of this patent

Abstract

Claims16