Capacitor structures for dynamic random access memory cells

A capacitive storage node for a dynamic random access memory device, the dynamic random access memory device comprising a first digit line and a second digit line substantially parallel to the first digit line along at least a portion of their length and including a plurality of memory cells all being fabricated on a semiconductor substrate, the capacitive storage node comprising:

• a first protrusion formed between the first digit line and the second digit line and immediately adjacent to the first digit line, the first protrusion extending substantially perpendicularly from the plane of the semiconductor substrate, the shape of the first protrusion being substantially elongated and having a first side and a second side;
• a second protrusion formed between the second digit line and the first protrusion and immediately adjacent to the second digit line, the second protrusion extending substantially perpendicularly from the plane of the semiconductor substrate, the shape of the second protrusion being substantially elongated and having a first side and a second side;
• a first conductive layer formed over at least the first side of the first protrusion, over at least the first side of the second protrusion, and over at least a portion of the surface between the first and the second protrusions, the first conductive layer functioning as a first capacitor plate for an individual memory cell;
• a dielectric layer formed over the first conductive layer;
• a second conductive layer formed over the dielectric layer, the second conductive layer functioning as a second capacitor plate;
• a third protrusion formed between the first protrusion and the second protrusion, the third protrusion extending substantially perpendicularly from the plane of the semiconductor substrate, the shape of the third protrusion being substantially elongated and having a first side and a second side;
• and
• a fourth protrusion formed between the third protrusion and the second protrusion, the fourth protrusion extending substantially perpendicularly from the plane of the semiconductor substrate, the shape of the fourth protrusion being substantially elongated and having a first side and a second side, the first conductive layer being formed over at least a portion of the first and second sides of each of the third and fourth protrusions;
• wherein the capacitive storage node has a maximum of two capacitor plates.

A dynamic random access memory device including a plurality of memory cells, the device comprising:

• a semiconductor substrate;
• a first word line;
• a second word line;
• a first digit line;
• a second digit line;
• a first spacer positioned immediately adjacent to the first digit line and extending substantially perpendicularly from the plane of the semiconductor substrate, the first spacer having first and second sides, the height of the first spacer being at least two times as great as its width at its base, the first spacer being substantially parallel to the first digit line;
• a second spacer positioned immediately adjacent to the second digit line and extending substantially perpendicularly from the plane of the semiconductor substrate, the second spacer having first and second sides, the height of the second spacer being at least two times as great as its width at its base, the second spacer being substantially parallel to the second digit line and positioned between the first spacer and the second digit line;
• a storage node layer formed on at least the first side of the first spacer and at least the first side of the second spacer and at least some of any space existing between the first and the second spacers;
• a dielectric layer formed over the storage node layer;
• a cell plate layer formed over the dielectric layer, such that the storage node layer, the dielectric layer, and the cell plate layer together form a memory cell capacitor;
• a third spacer extending substantially perpendicularly from the plane of the semiconductor substrate, the third spacer having first and second sides and being substantially parallel to the first digit line and positioned between the first spacer and the second spacer;
• and
• a fourth spacer extending substantially perpendicularly from the plane of the semiconductor substrate, the fourth spacer having first and second sides and being substantially parallel to the second digit line and positioned between the third spacer and the second spacer, the storage node layer being further formed on the first and second sides of the third spacer and the first and second sides of the fourth spacer and at least some of any space existing between the third and the fourth spacers;
• wherein the first spacer has a height greater than the first digit line and wherein the second spacer has a height greater than the second digit line and wherein the storage node layer is formed over a portion of the first digit line and a portion of the second digit line.

A dynamic random access memory device including a plurality of memory cells, the device comprising:

• a semiconductor substrate;
• a first word line;
• a second word line;
• a first digit line;
• a second digit line;
• a first spacer positioned immediately adjacent to the first digit line and extending substantially perpendicularly from the plane of the semiconductor substrate, the first spacer having first and second sides, the height of the first spacer being at least two times as great as its width at its base, the first spacer being substantially parallel to the first digit line;
• a second spacer positioned immediately adjacent to the second digit line and extending substantially perpendicularly from the plane of the semiconductor substrate, the second spacer having first and second sides, the height of the second spacer being at least two times as great as its width at its base, the second spacer being substantially parallel to the second digit line and positioned between the first spacer and the second digit line;
• a storage node layer formed on at least the first side of the first spacer and at least the first side of the second spacer and at least some of any space existing between the first and the second spacers;
• a dielectric layer formed over the storage node layer;
• a cell plate layer formed over the dielectric layer, such that the storage node layer, the dielectric layer, and the cell plate layer together form a memory cell capacitor;
• a third spacer extending substantially perpendicularly from the plane of the semiconductor substrate, the third spacer having first and second sides and being substantially parallel to the first digit line and positioned between the first spacer and the second spacer;
• and
• a fourth spacer extending substantially perpendicularly from the plane of the semiconductor substrate, the fourth spacer having first and second sides and being substantially parallel to the second digit line and positioned between the third spacer and the second spacer, the storage node layer being further formed on the first and second sides of the third spacer and the first and second sides of the fourth spacer and at least some of any space existing between the third and the fourth spacers;
• wherein the first spacer has a height not greater than the first digit line and wherein the second spacer has a height not greater than the second digit line and wherein the storage node layer is formed over at least a portion of the first digit line and at least a portion of the second digit line.

A method of fabricating a capacitor structure on an integrated circuit substrate comprising the steps of:

• forming a first spacer means for supporting a subsequently formed layer, the first spacer means comprising at least first and second sides;
• forming a second spacer means for supporting a subsequently formed layer, the second spacer means comprising at least first and second sides, wherein the step of forming the first spacer means and the step of forming the second spacer means result in the first spacer means and the second spacer means being oriented in a substantially parallel arrangement;
• forming a first capacitor plate layer on at least a first side of the first spacer means and a first side of the second spacer means and at least a portion of any surface adjoining therebetween;
• forming a dielectric layer over the first capacitor plate;
• forming a second capacitor plate on the dielectric layer, the first sides of the first and second spacer means supporting at least part of the capacitor structure on the integrated circuit;
• and
• forming a third spacer means for supporting a subsequently formed layer, the third spacer means comprising at least first and second sides, the third spacer means positioned between the first and second spacer means and wherein the first capacitor plate layer is formed on the first and second sides of the third spacer means and at least a portion of any surface adjoining between the third spacer means and the first and second spacer means.

A method of forming a storage node capacitor for a dynamic random access memory device comprising a first digit line and a second digit line substantially parallel to the first digit line, the dynamic random access memory device being fabricated on a substrate, the method comprising the steps of:

• forming a first spacer between the first digit line and the second digit line such that the first spacer extends substantially perpendicularly from the substrate, the first spacer being of a generally elongated shape;
• forming a second spacer between the second digit line and the first spacer such that the second spacer extends substantially perpendicularly from the substrate, the second spacer being of a generally elongated shape;
• forming a first conductive layer over the first spacer, the second spacer, and the surface between the first and the second digit lines, the first conductive layer functioning as a first capacitor plate;
• forming a dielectric layer over the first conductive layer;
• forming a second conductive layer over the dielectric layer, the second conductive layer functioning as a second capacitor plate such that the substantially vertical area of the first and the second spacers are included in the area of the first conductive layer functioning as a first capacitor plate;
• forming a storage node contact between the first conductive layer and the semiconductor substrate;
• and
• forming a third spacer, the third spacer comprising at least first and second sides and positioned between the first and second spacers and wherein the first conductive layer is formed on the first and second sides of the third spacer and at least a portion of any surface adjoining between the third spacer and the first and the second spacer.