Device for forming silicon oxide film
AssigneeCanon Kabushiki Kaisha
InventorShigeyuki Matsumoto
Life of this patent
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Abstract
A device for forming a silicon oxide film comprises a quartz tube housing a substrate comprised of silicon, means for heating internally said quartz tube and means for delivering and flowing hydrogen gas and oxygen gas into said quartz tube to effect hydrogen combustion, wherein the gas introducing holes for selectively delivering and flowing either one of said gases are arranged in the neighborhood to each other while facing each other.
Claims4
A device for forming a silicon oxide film on a silicon substrate comprising:
- a quartz tube in which said substrate is housed;
- means for delivering hydrogen gas and oxygen gas into said quartz tube to effect hydrogen combustion, including gas introducing holes for providing either of said gases, said gas introducing holes arranged adjacent and in opposition to each other and positioned at a distance of 450 mm or less from each other;
- and
- a heating element for internally heating said quartz tube, said heating element surrounding said gas introducing holes.
A method for forming a silicon oxide film on a silicon substrate in a reaction chamber, comprising:
- heating said reaction chamber to a temperature sufficient to generate steam from a mixture of oxygen gas and hydrogen gas by use of a heating element;
- introducing oxygen gas and hydrogen gas into said reaction chamber to generate steam using a gas introducing conduit system, said gas introducing conduit system including an oxygen gas introducing conduit having an outlet and a hydrogen gas introducing conduit having an outlet, said outlets positioned in opposition to each other so as to create a sufficient mixture of the oxygen gas and hydrogen gas to generate said steam said heating element surrounding said outlets;
- and
- effecting the formation of said silicon oxide film by bringing said steam into contact with said silicon substrate.
A device for forming a silicon oxide film on a silicon substrate comprising:
- a quartz tube having a quartz boat in which said substrate is housed;
- a quartz cap at one end of the quartz tube for preventing entry of the outer air:
- means for delivering hydrogen gas and oxygen gas into said quartz tube to effect hydrogen combustion;
- including gas introducing holes for providing either of said gases, said gas introducing holes arranged adjacent and in opposition to each other;
- and
- a heating element for internally heating said quartz tube, said heating element surrounding said gas introducing holes.
Dependencies are inferred from the claim text.