Semiconductor processing with non-jetting fluid stream discharge array
AssigneeSemitool, Inc.
InventorsEric J. Bergman, Thomas H. Oberlitner
Life of this patent
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Abstract
A semiconductor processor and methods using pillar shaped liquid emitters. The emitters have emission ports upon which liquid domes of processing chemicals are formed. The domes are applied to the surface of a wafer to wash discrete areas and thereby allow gases evolved from the reaction to easily escape about the domes and through gas passageways existing about the pillars. The wafer is rotated to provide even processing of the treated surface.
Claims26
A method for processing a treated surface of a semiconductor piece using a liquid, comprising:
- holding the semiconductor piece in a support to allow controlled positioning of the semiconductor piece relative to a liquid distributor;
- positioning said treated surface of the semiconductor piece into face-to-face relationship with the liquid distributor;
- said liquid distributor being located within a processing chamber and having an emitter array formed by a plurality of spaced liquid emitters;
- said positioning defining a clearance gap between emission ports of the liquid emitters and the treated surface of the semiconductor piece;
- providing gas escape passages formed between said liquid emitters of said emitter array;
- emitting a plurality of non-jetting emission streams of the liquid from the liquid emitters;
- said clearance gap being sufficiently close such that said emitting produces a plurality of localized wash areas upon the treated surface with the non-jetting emission streams as the emission streams flow from the emission ports of the liquid emitters;
- controllably moving the semiconductor piece relative to the liquid emitters;
- allowing gases to pass through the gas escape passages.
A method for processing a treated surface of a semiconductor piece using a liquid, comprising:
- holding said semiconductor piece with a piece holder;
- positioning said treated surface of the semiconductor piece into face-to-face relationship with a liquid distributor located within a processing chamber;
- said liquid distributor having an emitter array formed by a plurality of spaced liquid emitters;
- said positioning defining a clearance gap between emission ports of the liquid emitters and the treated surface of the semiconductor piece;
- providing gas escape passages formed between said liquid emitters of said emitter array;
- emitting a plurality of non-jetting emission streams of the liquid from the liquid emitters;
- said clearance gap being sufficiently close to allow washing localized wash areas of the treated surface with the non-jetting emission streams as the emission streams flow from the emission ports of the liquid emitters;
- adjusting the clearance gap by changing the relative positioning of said piece holder relative to the emitter array;
- allowing gases to pass through the gas escape passages.
Dependencies are inferred from the claim text.