Oxide superconducting film manufacturing apparatus

An oxide superconducting film manufacturing apparatus employing laser ablation method, said apparatus comprising:

• a thin film forming chamber having a laser-transparent laser entrance window;
• a target, being provided in said thin film forming chamber, containing components of an oxide superconductor;
• a laser beam source for irradiating said target with a laser beam from the exterior of said thin film forming chamber through said laser entrance window;
• a first detector for detecting intensity of light emission from a specific luminous species contained in particles scattered from said target during film formation;
• means for controlling power of said laser beam being emitted from said laser beam source so that the intensity of light emission from the luminous species is constant during film formation in response to light emission intensity detection output from said first detector;
• a second detector for detecting a control limit of said means for controlling power of said laser beam;
• a movable laser-transparent plate being provided between said laser entrance window and said target;
• and
• means for moving said movable laser-transparent plate in response to a detection output from said second detector, wherein said means for moving said movable laser-transparent plate rotates said movable laser-transparent plate while linearly moving the rotation axis of said movable laser-transparent plate.

An oxide superconducting film manufacturing apparatus employing laser ablation method, said apparatus comprising:

• a thin film forming chamber having a laser-transparent laser entrance window;
• a target, being provided in said thin film forming chamber, containing components of an oxide superconductor;
• a laser beam source for irradiating said target with a laser beam from the exterior of said thin film forming chamber through said laser entrance window;
• a detector for detecting intensity of light emission from a specific luminous species contained in particles scattered from said target during film formation;
• means for controlling power of said laser beam being emitted from said laser beam source so that the intensity of light emission from said luminous species is constant during film formation detection output from said detector;
• a movable laser-transparent plate being provided between said laser entrance window and said target;
• and
• means for continuously moving said movable laser-transparent plate during film formation, wherein, said means for continuously moving said movable laser-transparent plate rotates said movable laser-transparent plate while linearly moving the rotation axis of said movable laser-transparent plate.