Hopper for use in charging semiconductor source material
AssigneeMEMC Electronic Materials, Inc.
InventorsJulian Horvath, Dennis G. Jones, Jane E. Polett
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AssigneeMEMC Electronic Materials, Inc.
InventorsJulian Horvath, Dennis G. Jones, Jane E. Polett
Estimating the term…
A hopper is sized and shaped for reception in a crystal pulling apparatus for use in charging semiconductor source material to a crucible of the crystal pulling apparatus. The crystal pulling apparatus includes a pulling chamber, a growth chamber, an isolation valve operable to seal the growth chamber from the pulling chamber, and a crucible in the growth chamber. The hopper includes a bin constructed for containing a quantity of semiconductor source material. The bin has an opening in its bottom for delivery of the semiconductor source material from the bin to the crucible. A stopper constructed for closing the opening to prohibit passage of semiconductor source material from the bin is moved by a stopper actuating mechanism between a closed position and an open position. A connector attached to the hopper is constructed for temporarily mounting the hopper in the crystal pulling apparatus.
A hopper for use in charging semiconductor source material to a crucible of a crystal pulling apparatus which produces monocrystals by the Czochralski method, the crystal pulling apparatus including a pulling chamber, a growth chamber, an isolation valve operable to seal the growth chamber from the pulling chamber, and a crucible in the growth chamber, a hopper being sized and shaped for reception in the crystal pulling apparatus, the hopper comprising a bin constructed for containing a quantity of semiconductor source material, the bin having an opening in its bottom for delivery of the semiconductor source material from the bin to the crucible, a stopper constructed for closing the opening to prohibit passage of semiconductor source material from the bin, a stopper actuating mechanism for moving the stopper between a closed position and an open position, and a connector attached to the hopper constructed for temporarily mounting the hopper in the crystal pulling apparatus.
Dependencies are inferred from the claim text.