Rotary cleaning method with chemical solutions and rotary cleaning apparatus with chemical solutions

A cleaning apparatus comprising at least:

• a cleaning bath having a movable cover at its top for sealing the bath by closing the cover;
• object-to-be-cleaned holding means for holding an object to be cleaned in the cleaning bath;
• rotating means for rotating the object-to-be-cleaned holding means;
• gas introducing means for introducing gas into the cleaning bath;
• a first nozzle for feeding a first chemical solution to the surface of an object to be cleaned held by the object-to-be-leaned holding means;
• a second nozzle for feeding a second chemical solution to the surface of an object to be cleaned held by the object-to-be-cleaned holding means;
• a third nozzle for spraying a first chemical solution onto the back of an object to be cleaned held by the object-to-be-cleaned holding means;
• a fourth nozzle for spraying a second chemical solution onto the back of an object to be cleaned held by the object-to-be-cleaned holding means;
• a fifth nozzle for feeding ultrapure water to the surface of an object to be cleaned held by the object-to-be-cleaned holding means;
• a sixth nozzle for spraying ultrapure water onto the back of an object to be cleaned held by the object-to-be-cleaned holding means;
• a chemical solution feed line connected to each of the first to the fourth nozzles;
• an external chemical solution feeder connected to each chemical solution feed line for feeding a chemical solution;
• an ultrapure water feed line connected to the fifth and sixth nozzles;
• ozone adding means for selectively adding ozone to ultrapure water;
• and
• a drainage line for completely assorting waste liquids after cleaning.