Substrate heating mechanism
AssigneeCanon Kabushiki Kaisha
InventorNobuyuki Okamura
Life of this patent
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Abstract
A substrate-heating mechanism has a heat source for heating a substrate for heating a substrate face side reverse to a film formation face in a film deposition on the film formation surface of the substrate held on a substrate holder in a vacuum chamber, the mechanism comprises a second vacuum chamber for maintaining vacuum the substrate face reverse to the film formation face.
Claims4
A film-forming apparatus comprising:
- a first vacuum chamber connected to a gas introducing conduit for introducing a gas into the first vacuum chamber and to a first evacuating means for vacuum evacuating the chamber and having therein a substrate held by a substrate holder and a plasma region including a film-forming region of the substrate;
- a second vacuum chamber connected to a second evacuating means for vacuum evacuating the second vacuum chamber and having a region including a surface of the substrate opposite to the film-forming region, a heating means for heating the opposite surface and a cooling means for cooling the substrate holder;
- and
- means for lowering the inner pressures of the first and the second vacuum chambers to below 1.0.times.10.sup.-8 Torr by the first and the second evacuating means at the same time of plasma generation in the first vacuum chamber and heating by the heating means, cooling the substrate holder by the cooling means, and introducing a gas from the gas introducing conduit into the first vacuum chamber in the order mentioned.
A film-forming apparatus comprising:
- a first vacuum chamber connected to a gas introducing conduit for introducing a gas into the first vacuum chamber and to a first evacuating means for vacuum evacuating the chamber and having therein a substrate held by a substrate holder and a plasma region including a film-forming region of the substrate;
- a second vacuum chamber connected to a second evacuating means for vacuum evacuating the second vacuum chamber and having a cooling means for cooling the substrate holder;
- a heating means provided outside the first and the second vacuum chambers and having a light source for heating a surface of the substrate opposite to the film-forming region;
- and
- means for lowering the inner pressures of the first and the second vacuum chambers to below 1.0.times.10.sup.-8 Torr by the first and the second evacuating means at the same time of plasma generation in the first vacuum chamber and heating by the heating means, cooling the substrate holder by the cooling means, and introducing a gas from the gas introducing conduit into the first vacuum chamber in the order mentioned.
A method for preparing a deposited film prepared by a film-forming apparatus comprising a first vacuum chamber connected to a gas introducing conduit for introducing a gas into the first vacuum chamber and to a first evacuating means for vacuum evacuating the chamber and having therein a substrate held by a substrate holder and a plasma region including a film-forming region of the substrate, and a second vacuum chamber connected to a second evacuating means for vacuum evacuating the second vacuum chamber and having a region including a surface of the substrate opposite to the film-forming region, a heating means for heating the opposite surface and a cooling means for cooling the substrate holder, comprising the steps of:
- lowering the inner pressures of the first and the second vacuum chambers to below 0.10.times.10.sup.-8 Torr by the first and the second evacuating means at the same time of plasma generation in the first vacuum chamber and heating by the heating means;
- cooling the substrate holder by the cooling means;
- introducing a gas from the gas introducing conduit into the first vacuum chamber.
A method for preparing a deposited film prepared by a film-forming apparatus comprising a first vacuum chamber connected to a gas introducing conduit for introducing a gas into the first vacuum chamber and to a first evacuating means for vacuum evacuating the chamber and having therein a substrate held by a substrate holder and a plasma region including a film-forming region of the substrate, and a second vacuum chamber connected to a second evacuating means for vacuum evacuating the second vacuum chamber and having a cooling means for cooling the substrate holder, and a heating means provided outside the first and the second vacuum chambers and having a light source for heating a surface of the substrate opposite to the film-forming region, comprising the steps of:
- lowering the inner pressures of the first and the second vacuum chambers to below 1.0.times.10.sup.-8 torr by the first and the second evacuating means at the same time of plasma generation in the first vacuum chamber and heating by the heating means;
- cooling the substrate holder by the cooling means;
- and
- introducing a gas from the gas introducing conduit into the first vacuum chamber.
Dependencies are inferred from the claim text.