Process for an improved laminate of ZnSe and ZnS
AssigneeCVD Incorporated
InventorsRaymond L. Taylor, Lee E. Burns, James C. MacDonald
Life of this patent
Estimating the term…
Abstract
The surface of a zinc selenide substrate is ground to curve in the opposite direction from that which occurs due to the bimetallic effect when zinc sulfide is deposited on a flat substrate by the chemical vapor deposition process. The bowing of the interface that occurs upon cooling of the hot laminate when the surface of the substrate is flat before deposition is compensated for by the pre-figured bowing. A distortion free window for the transmission of infra-red radiation is provided by this invention.
Claims2
In a chemical vapor deposition apparatus comprising a furnace, a mandrel box mounted within the furnace and defining a vapor deposition zone, the box comprising a mandrel plate having a passage therein communicating with the deposition zone, a substrate holding frame removably mounted on said mandrel plate in overlapping relation to the passage and having an opening therein in alignment with said mandrel plate passage, and a back plate removably mounted on holding frame plate as a closure for the opening, the improvement comprising:
- a restraint-free substrate holding frame and back plane assembly having lips projecting toward each other from opposite boundaries of the opening in the frame and between the deposition zone and the back plate, the lips adapted for support of a substrate to be placed in the opening, the opening otherwise being larger than the substrate to be placed in said opening, and the distance between the lips and the back plate being larger than the thickness of the substrate.
Dependencies are inferred from the claim text.