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AssigneeSumitomo Chemical Company, Limited
InventorsSatoshi Taguchi, Masumi Suetsugu, Tsutomu Nagase, Norikazu Nakagawa
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A developer preparing apparatus for obtaining a developer containing a developer component having a definite content by mixing an undiluted developer solution containing 5 to 40% by weight of tetramethylammonium hydroxide (TMAH) and pure water, and a developer preparing method for preparing the developer using the developer preparing apparatus. The developer preparing apparatus comprising a mixing bath equipped with a means for receiving and mixing an undiluted developer solution and pure water, an ultrasonic densitometer for measuring the developer component contained in the developer in the mixing bath, a flow rate controlling means for controlling the supplying flow rate of the undiluted developer solution and/or pure water into the mixing bath by the output signal from the ultrasonic densitometer, and a storage tank for receiving and storing the developer containing the developer component having the definite content in the mixing bath.
A developer preparing apparatus for obtaining a developer comprising a mixture of an undiluted developer solution containing 5 to 40% by weight of tetramethylammonium hydroxide, pure water containing a metal ion of not more than 0.1 ppb, an organic substance of not more than 1 ppm expressed by total carbons, and a fine particle having a diameter of not less than 0.2 .mu.m of not more than 100/ml, said apparatus comprising:
A developer preparing method for preparing a developer comprising a mixture of an undiluted developer solution containing 5 to 40% by weight of tetramethylammonium hydroxide, pure water containing a metal ion of not more than 0.1 ppb, an organic substance of not more than 1 ppm expressed by total carbons, and a fine particle having a diameter of not less than 0.2 .mu.m of not more than 100/ml;
Dependencies are inferred from the claim text.