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US 5,475,892 AGranted
Semiconductor wafer particle extractor
AssigneeTexas Instruments Incorporated
InventorMark A. McGuire
Life of this patent
Estimating the term…
Abstract
An alignment apparatus for aligning the flat edges on semiconductor wafers has a roller 13 used to turn the wafers 12 during alignment. The roller 13 is hollow and has a plurality of holes 14 in the surface of the roller though which a vacuum is drawn to remove particle contaminates from and around the semiconductor wafers.
Claims9
An alignment apparatus for aligning the flat edges on semiconductor edges, comprising:
- a frame for receiving a wafer cassette;
- a hollow cylindrical roller mounted in said frame and positioned to be in rolling contact with the semiconductor wafers in said cassette;
- a plurality of openings in said roller extending from an outer surface of said roller into the interior of said roller;
- and
- a vacuum line attached to said roller for pulling a vacuum through said plurality of openings into the interior of said roller.
2 more elements
The apparatus according to claim 3, including a rotating seal joint connecting the hollow shaft to said vacuum line.
An alignment apparatus for aligning the flat edges on semiconductor edges, comprising:
- a frame for receiving a wafer cassette;
- a hollow cylindrical roller rotatably mounted on a hollow shaft in said frame, and positioned to be in rolling contact with the semiconductor wafers in said cassette;
- a plurality of openings in said roller extending from an outer surface of said roller into the interior of said roller;
- and
- a vacuum line attached to said hollow shaft for pulling a vacuum through said plurality of openings into the interior of said roller.
2 more elements
Dependencies are inferred from the claim text.