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US 5,475,265 AGranted
Semiconductor device including gold interconnections where the gold grain size is a function of the width of the interconnections
AssigneeNEC Corporation
InventorHirosi Kato
Life of this patent
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Abstract
In a semiconductor device having gold interconnections for connecting elements formed on a substrate with each other, the improvement is that the average dimension of gold grains constituting the gold interconnections is determined to be 0.17 through 0.25 times as large as width of the gold interconnections.
Claims4
A semiconductor device comprising:
- a substrate;
- an insulative layer formed on said substrate;
- an electrically conductive metal layer formed on said insulative layer in a desired pattern;
- an interconnection layer formed on said electrically conductive metal layer, said interconnection layer being composed of gold, an average dimension of grains of said gold being determined to be 0.17 through 0.25 times as large as a width of said interconnection layer, said width of said interconnection layer being in the range of 0.8 to 3 .mu.m;
- and
- an oxide layer for entirely covering said interconnection layer, said electrically conductive metal layer and said insulative layer.
3 more elements
A semiconductor device comprising:
- a substrate;
- an insulative layer formed on said substrate;
- a titanium layer formed on said insulative layer in a desired pattern;
- a platinum layer formed on said titanium layer;
- an interconnection layer formed on said platinum layer, said interconnection layer being composed of gold, an average dimension of grains of said gold being determined to be 0.17 through 0.25 times as large as a width of said interconnection layer so that the mean time to failure of said interconnection layer is at least equal to 3000 hours, said width of said interconnection layer being in the range of 0.8 to 3 micrometers, and
- an oxide silicon layer for entirely covering said interconnection layer, said platinum layer, said titanium layer and said insulative layer.
3 more elements
Dependencies are inferred from the claim text.