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US 5,472,830 AGranted
Non-corrosion photoresist stripping composition
AssigneeOCG Microelectronic Materials, Inc.
InventorKenji Honda
Life of this patent
Estimating the term…
Abstract
A non-corrosive photoresist stripping composition containing: (a) 85-10% by weight of an organic polar solvent having a dipole moment of more than 3.5; (b) 10-40% by weight of selected amine compounds; (c) 5-30% by weight of selected amino acid having a hydroxyl group; and, optionally, (d) 0-20% by weight water.
Claims7
A resist stripper composition comprising:
- (a) from about 85 to about 10% by weight of an organic polar solvent having a dipole moment of more than 3.5;
- (b) from about 10 to about 40% by weight of an amine compound selected from the group consisting of compounds having the formula (I):
- ##STR5## wherein n and m are each independently an integer ranging from 1-5, inclusive;
- X is hydrogen, alkyl, or alkoxy group;
- Y is either --O-- or --NH--;
- and Z is hydrogen, --OH, or --NH.sub.2 ;
- (c) from about 5 to about 30% by weight of an amino acid selected from the group consisting of compounds having the formula (II):
- ##STR6## wherein n is an integer ranging from 1-3;
- R.sup.1 and R.sup.2 are each independently selected from the group consisting of hydrogen and compounds having the formula (III):
- ##STR7## wherein R.sup.5, R.sup.6, and R.sup.7 are each independently selected from hydrogen, --OH, --CH.sub.2 OH, alkyl, alkoxy, phenyl, and mono-, di- or tri-hydroxy-substituted phenyl groups;
- and R.sup.3 and R.sup.4 are each independently selected from the group consisting of hydrogen and compounds having the formula (IV):
- ##STR8## wherein X', Y' and Z' are each independently selected from hydrogen, OH, --CH.sub.2 OH, --CH.sub.2 CH.sub.2 OH, --CH.sub.2 COOH, alkyl, or alkoxy group, and at least one of them is --OH or --CH.sub.2 OH or --CH.sub.2 CH.sub.2 OH.
- (d) from about 0 to about 20% by weight of water all percents based on the weight of the stripper composition.
10 more elements
Dependencies are inferred from the claim text.