Back to results
US 5,472,509 AGranted
Gas plasma apparatus with movable film liners
AssigneeNeoMecs Incorporated
InventorNomura Hiroshi
Life of this patent
Estimating the term…
Abstract
An apparatus for the treatment of articles with a polymerizate-producing gas plasma is disclosed wherein a set of movable film liners is used to shield the walls of a gas-plasma-containing reaction tunnel from excessive build-up of polymerizate deposits. In an operation involving continuous gas plasma coating of a film, fiber, fabric, tubing or string of workpieces, at least 75 to 90 percent of potential wall deposits are removable by the set of film liners.
Claims14
An apparatus for gas plasma treatment of articles, comprising:
- a reaction tunnel having a first and a second end, the first end connected to a first vacuum chamber and the second end connected to a second vacuum chamber, an electrode means mounted on the reaction tunnel for producing a gas plasma within the reaction tunnel, a plurality of movable film liners extending through the reaction tunnel from a set of feed rolls positioned in the first vacuum chamber to a set of take-up rolls positioned in the second vacuum chamber, each of the movable film liners following a path in close proximity to an inner surface of the reaction tunnel, the plurality of the movable liner films collectively shielding all inner surfaces of the reaction tunnel wherein a gas plasma is to be produced, a means for driving the take-up rolls, and a means for conducting through the reaction tunnel an article to be treated by a gas plasma.
An apparatus for gas plasma treatment of articles, comprising:
- a) a reaction tunnel having a first and a second end,
- b) a first base plate of a first bell chamber connected to the first end of the reaction tunnel, the first base plate having a plurality of feed rolls of movable film liners mounted thereto around an entrance opening through the base plate into the reaction tunnel,
- c) a second base plate of a second bell chamber connected to the second end of the reaction tunnel, the second base plate having a plurality of take-up rolls for the movable film liners mounted thereto around an exit opening from the reaction tunnel through the base plate,
- d) a plurality of movable liner films extending through the reaction tunnel, each movable film liner extending from an individual member of the plurality of feed rolls to an individual member of the plurality of take-up rolls,
- e) a means for applying resistance to unwinding of each member of the plurality of feed rolls,
- f) a means for driving each member of the plurality of the take-up rolls, whereby each of the movable liner films can be pulled under tension through the reaction tunnel, each of the movable liner films following a path in close proximity to an inner surface of the reaction tunnel, the plurality of the movable liner films collectively shielding all inner surfaces of the reaction tunnel wherein a gas plasma is to be produced, and
- g) a means for conveying through the reaction tunnel an article to be treated by a gas plasma.
4 more elements
Dependencies are inferred from the claim text.