Method and apparatus for treating and cleaning plates by means of a central reactor
AssigneeSapi Equipements S.A.
InventorsGeorges L. Michel, Olivier M. Nathan
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AssigneeSapi Equipements S.A.
InventorsGeorges L. Michel, Olivier M. Nathan
Estimating the term…
The present invention relates to central reactor apparatus for applying cleaning treatments to plates such as regularly-shaped flat parts e.g. semiconductor media as used for making integrated circuits, or optical disks, etc. . . . The apparatus comprises a chamber including side walls, an end wall, an opening through a front plate facing said end wall, support means enabling a plurality of parts to be supported, means for injecting treatment fluids, closure means for closing said chamber, and discharge means for discharging said fluids, thereby enabling said parts to be treated by means of said fluids and subsequently enabling the chamber to be emptied. Said means for supporting the parts is secured to the closure means and is constituted by two side combs which are articulated on links enabling the combs to be tilted apart from each other to enable said parts to pass between them, and then to be tilted towards each other so that they engage beneath the parts and support them inside said chamber.
A method of treating regularly-shaped flat parts having no central opening, using a chamber having side walls, an end wall, an opening in a front plate facing said end wall, support means enabling a plurality of parts to be carried, means for injecting treatment fluids therein in order to completely immerse said Darts in said fluids, means for closing said chamber, and means for discharging said fluids, thereby enabling said parts to be treated by said fluids, and enabling said fluids subsequently to be discharged from said chamber, wherein:
Apparatus for treating regularly-shaped flat parts having no central opening, the apparatus comprising a chamber having side walls, an end wall, an opening through a front plate facing said end wall, support means enabling a plurality of parts to be carried, means for injecting treatment fluids so as to immerse said parts completely in said fluids, closure means for closing said chamber, and means for discharging said fluids in such a manner as to enable said parts to be treated by said fluids and then to empty said chamber, wherein said support means for the parts is secured to the closure means and is constituted by two lateral combs which are articulated on links enabling them to be moved apart so as to allow said parts to pass between the combs by tilting the combs away from each other, and then enabling the combs to tilt back towards each other so as to support the parts from below and hold them in said chamber.
Dependencies are inferred from the claim text.