Apparatus for forming deposited film

An apparatus for forming multilayer deposited films by introducing a gaseous starting material for formation of a deposited film and a gaseous halogenic oxidizing agent having the property of oxidation action for said starting material into a reaction space to effect chemical contact therebetween to thereby form a plural number of precursors including a precursor in an excited state, and forming a deposited film on a substrate existing in a film forming space spatially communicated with said reaction space with the use of at least one precursor of the precursors as the feeding source for the constituent element of the deposited film, said apparatus comprising rotatory driving means for rotating said substrate, at least a first gas releasing means connected to a means for supplying a mixture of at least a first gaseous starting material and a gaseous halogenic oxidizing agent, and at least a second gas releasing means connected to a means for supplying a mixture of a second gaseous starting material which is different from the first gaseous starting material and the gaseous halogenic oxidizing agent, wherein the first gas releasing means and the second gas releasing means are disposed at different positions in relation to the direction of rotation of the substrate in the reaction space.