Scanning apparatus linearization and calibration system

A method of determining the displacement of a scanning means relative to a base member in a scanning apparatus which comprises:

• (a) inputting a signal representing a desired displacement to a piezoelectric actuator connected to said scanning means;
• (b) measuring the output of a strain-gauge mounted upon an elastic member disposed between said scanning means and said base member;
• (c) correcting said input signal based upon the difference between the output of said strain gauge and a predetermined relationship between said strain gauge output and displacement of said scanning means;
• repeating steps a), b), and c) for at least one additional axis of displacement;
• and
• deriving outputs from said strain gauges representing the displacement of said scanning means.

An apparatus for the measurement of the displacement of a scanning member in a scanning microscope relative to a base member in said microscope which comprises:

• a scanning member mounted to a base member;
• a plurality of piezoelectric actuators arranged to deflect said scanning member relative to said base member along a predetermined axis;
• a plurality of elastic members connected between said scanning member and said base member;
• a plurality of strain gauges mounted upon said plurality of elastic members to measure the deflection of said elastic members;
• an electronic system to measure the outputs of said plurality of strain gauges;
• and
• an electronic system to compare the outputs of said plurality of strain gauges to a predetermined relationship between said strain gauge outputs and scanning member displacement for determining motion of said scanning member in at least two dimensions.

A system for linearization and calibration of an electromechanical scanning apparatus, said system comprising:

• fixed mounting means;
• a translating stage tower member mounted to said fixed mounting means for movement of a sample stage portion in at least one dimension relative to said fixed mounting means;
• control means for generating a command signal for a desired displacement of said translating stage tower member;
• electromechanical actuator means electrically connected to said control means and mounted to said fixed mounting means for displacing said translating stage tower member relative to said fixed mounting means in response to said command signal;
• deflecting means mounted between said translating stage tower member and said fixed mounting means adapted to undergo deflection in response to displacement of said translating stage tower member;
• means attached to said deflecting means for measuring said deflection of said deflecting means and for generating an output deflection signal indicative of an amount of deflection of said deflecting means;
• and
• means for determining an actual displacement of said translating stage tower member in said at least one dimension of displacement based upon said output deflection signal.

A system for linearization and calibration of an electromechanical scanning apparatus, said system comprising:

• fixed mounting means;
• a piezoelelectric tube scanner member mounted to said fixed mounting means for displacement of a sample stage portion attached to said tube scanner member in at least one dimension relative to said fixed mounting means;
• control means for generating a command signal for a desired displacement of said piezoelectric tube scanner member;
• electromechanical actuator means electrically connected to said control means and mounted to said fixed mounting means for displacing said piezoelectric tube scanner member in said at least one dimension of displacement relative to said fixed mounting means in response to said command signal;
• deflecting means mounted between said piezoelectric tube scanner member and said fixed mounting means adapted to undergo deflection in response to displacement of said piezoelectric tube scanner member;
• means attached to said deflecting means for measuring said deflection of said deflecting means and for generating an output deflection signal indicative of an amount of deflection of said deflecting means;
• and
• means for determining an actual displacement of said piezoelectric tube scanner member in said at least one dimension of displacement based upon said output deflection signal.

A method of determining the displacement of a scanning means relative to a base member in a scanning apparatus which comprises:

• (a) inputting a signal representing a desired displacement to a piezoelectric actuator connected to said scanning means;
• (b) measuring deflection of a deflecting member disposed between said scanning means and said base member and generating an output deflection signal indicative of an amount of deflection of said deflecting member;
• (c) correcting said input signal based upon the difference between the output deflection signal and a predetermined relationship between said output deflection signal and displacement of said scanning means;
• repeating steps (a), (b), (c) for at least one additional axis of displacement;
• and
• deriving outputs from said output deflection signals representing the displacement of said scanning means.