Draining and drying apparatus of semiconductor materials
AssigneeSugai Corporation
InventorTamotsu Mezaki
Life of this patent
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Abstract
A draining and drying apparatus of semiconductor materials capable of adjusting the rotation balance of a rotor for holding the semiconductor materials without requiring any filling works of dummy semiconductor materials. In a rotary casing, a rotor horizontal moving mechanism is mounted on a rotation main shaft of a rotor, and the rotor is mounted on this rotor horizontal moving mechanism, and the rotor is mechanically moved horizontally in the intersecting direction to the rotation main shaft by the rotor horizontal moving mechanism, so that the rotation balance of the rotor may be adjusted.
Claims10
A draining and drying apparatus of semiconductor materials comprising:
- rotor means disposed rotatably in a stationary rotor casing for holding semiconductor materials,
- rotation main shaft means for supporting so as to rotate the rotor means at high speed, and
- rotor horizontal moving means interposed between the rotation main shaft means and the rotor means so as to move and adjust the horizontal direction position of the rotor means with respect to the rotation main shaft means,
- wherein said draining and drying apparatus is constituted so as to adjust the rotation balance depending on the holding state of the semiconductor materials.
A draining and drying apparatus of semiconductor materials in a constitution in which a rotor is disposed in a rotor casing, a pair of cradles are disposed on the rotor oppositely each other across a center of the rotor, and the semiconductor materials contained in these cradles are drained and dried by high speed rotation of the rotor,
- wherein a rotor horizontal moving mechanism is incorporated in the rotation main shaft, and the rotor is mounted on the rotor horizontal moving mechanism, and
- the rotor horizontal moving mechanism comprises a rotation base affixed and supported on the upper end of the rotation main shaft, a rotor mounting part disposed on this rotation base so as to be movable horizontally toward the opposite directions of both said cradles, and a driving part for moving the rotor mounting part horizontally.
Dependencies are inferred from the claim text.