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US 5,450,463 AGranted
X-ray microscope
AssigneeOlympus Optical Co., Ltd.
InventorYoshinori Iketaki
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AssigneeOlympus Optical Co., Ltd.
InventorYoshinori Iketaki
Estimating the term…
An X-ray microscope for observing a transmitted X-ray microscopic image of a specimen by irradiating the specimen with X-rays and exciting radiation rays, in which the exciting radiation rays are made incident upon the specimen at a large photon flux in an efficient manner without loss, so that a contrast of the image can be increased. The invention provides a desired relationship between thickness of specimen, wavelength of X-rays and tone resolving power of image for obtaining a transmitted X-ray microscopic image having an excellent contrast. The invention further proposes optimizations for a photon flux of exciting radiation rays as well as for a timing of irradiation of X-rays and exciting radiation rays. The X-ray microscope can observe particular element contained in particular substance without being affected by the same element contained in other substances which constitute a specimen together with the particular substance by suitably selecting a wavelength of the exciting radiation rays. The invention further propose a secondary electron microscope, in which a specimen is irradiated with X-rays and exciting radiation rays and secondary electrons emitted from the specimen are detected by an electron monochrometer.
In an X-ray microscope for forming a transmitted X-ray microscopic image of a specimen by irradiating the specimen with soft X-rays and ultraviolet rays, the improvement wherein the X-ray microscope is constructed to satisfy the following condition:
An X-ray microscope for forming a transmitted X-ray microscopic image of a specimen by irradiating the specimen with soft X-rays and exciting radiation rays, the improvement wherein the exciting radiation rays, having a photon flux which satisfies the following condition are made incident upon the specimen:
In an X-ray microscope for forming a transmitted X-ray microscopic image of a specimen by irradiating the specimen with soft X-rays and exciting radiation rays, the improvement wherein the X-ray microscope is constructed such that, after an initiation of irradiation with the exciting radiation rays, irradiation with said soft X-rays is started within a time period of (T+.tau.);
In an X-ray microscope for forming a transmitted X-ray microscopic image of a specimen by irradiating the specimen with soft X-rays and exciting radiation rays, the improvement wherein the X-ray microscope is constructed such that a wavelength of said exciting radiation rays is changed in accordance with a substance under observation contained in the specimen.
Dependencies are inferred from the claim text.