Method for forming macroparticle-free DLC films by cathodic arc discharge
AssigneeMinnesota Mining and Manufacturing Company
InventorsDavid G. O'Neill, Jonathan G. Storer
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Abstract
The present invention provides a method for producing a diamond-like carbon coating. The method comprises the steps of providing a substrate to be coated, providing a cathode of vitreous carbon or a pyrolytic graphite cathode and initiating a cathodic arc discharge with the arc spot on the cathode surface and directing the resulting carbon plasma toward the substrate to form a coating on said substrate, said coating being substantially macroparticle free.
Claims13
A method for producing a diamond-like carbon coating comprising the steps of providing a substrate to be coated, providing a cathode of vitreous carbon or a pyrolytic graphite cathode and initiating a substantially macroparticle free cathodic arc discharge with the arc spot on the cathode surface and directing the resulting carbon plasma toward the substrate to form said coating on said substrate, said coating being substantially macroparticle free.
A method for producing a diamond-like carbon coating comprising the steps of providing a substrate to be coated, providing a cathode of vitreous carbon in a magnetic field and initiating a substantially macroparticle free cathodic arc discharge with the arc spot on the cathode surface and directing the resulting carbon plasma toward the substrate to form said coating on said substrate, said coating being substantially macroparticle free.
A method for producing a diamond-like carbon coating comprising the steps of providing a substrate to be coated, providing a pyrolytic graphite cathode and initiating a substantially macroparticle free cathodic arc discharge with the arc spot on the cathode surface and directing the resulting carbon plasma toward the substrate to form said coating on said substrate, said coating being substantially macroparticle free.
Dependencies are inferred from the claim text.