Method for manufacturing a semiconductor device
AssigneeHyundai Electronics Industries Co., Ltd.
InventorsJae H. Ha, Hee K. Park
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Abstract
A method for manufacturing a semiconductor device including the steps of forming a photoresist pattern on a metal layer and forming a wiring by etching a metal composed of aluminum or aluminum alloy with plasma including chlorine and eliminating said photoresist pattern while simultaneously eliminating residual chlorine on the wiring by adding alkyl ketone or alkyl ether in an oxygen plasma ash chamber. The present invention can provide a method for manufacturing a semiconductor device, which can eliminate residual chlorine and a photoresist pattern by adding alkyl ketone or alkyl ether so that wiring corrosion may be prevented.
Claims4
A method for manufacturing a semiconductor device comprising the steps of:
- forming a photoresist pattern on a metal layer comprising one of aluminum and aluminum alloy;
- forming wiring by etching said metal layer with plasma including chlorine;
- and
- removing said photoresist pattern and residual chlorine on said wiring by adding alkyl ketone in an oxygen plasma ash chamber.
A method according to 1, wherein an alkyl radical of said alkyl ketone added in said oxygen plasma ash chamber is one of CH.sub.3, C.sub.2 H.sub.5, C.sub.3 H.sub.7 , and C.sub.2 H.sub.6.
A method for manufacturing a semiconductor device comprising the steps of:
- forming photoresist pattern on a metal layer comprising one of aluminum and aluminum alloy;
- forming wiring by etching said metal layer with plasma including chlorine;
- and
- removing said photoresist pattern and residual chlorine on said wiring by adding alkyl ether in an oxygen plasma ash chamber.
A method according to 3, wherein an alkyl radical of said alkyl ether added in said oxygen plasma ash chamber is one of CH.sub.3, C.sub.2 H.sub.5, C.sub.3 H.sub.7 , and C.sub.2 H.sub.6.
Dependencies are inferred from the claim text.