Module in an integrated delivery system for chemical vapors from liquid sources
OwnerCraig M. Staufferinventor
Life of this patent
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Abstract
An integrated module with a heated reservoir to vaporize liquid for semiconductor processes with liquid sources is presented. Shut-off valves and a proportioning pressure valve for controlling the flow of the vapor from the reservoir are mounted on the module for simple conduction heating of the valves. A capacitance manometer also mounted to the module also has its own heating elements. Condensation of the vapor is avoided and consistence performance and reliability is obtained.
Claims12
An integrated module for the delivery of chemical vapor from a liquid source through an inlet to a processing chamber of a processing unit for semiconductor wafers, said module comprising
- a metal housing defining a reservoir for holding a liquid from said source;
- a supply channel connecting said reservoir to a supply inlet for connection to said source;
- a gas channel connecting said reservoir to an outlet;
- means for mounting said housing to said processing unit such that said outlet is connected to said processing chamber inlet;
- means in said housing for heating said reservoir so that liquid in said reservoir is transformed into vapor, said heating means including a heat transfer plate extending into said reservoir to heat said liquid;
- and
- means connected to said gas channel for controlling the delivery of said vapor from said reservoir to said processing chamber;
- whereby said module controllably and precisely supplies vapor at a constant, uniform and repeatable temperature from said liquid supply to said processing chamber.
An integrated module for the delivery of chemical vapor from a liquid source through an inlet to a processing chamber of a processing unit for semiconductor wafers, said module comprising
- a metal housing defining a reservoir therein for holding a liquid having a silylation agent from said source;
- a supply channel in said housing connecting said reservoir to a supply inlet for connection to said source;
- a gas channel in said housing connecting said reservoir to an outlet;
- means for mounting said housing to said processing unit such that said outlet is connected to said processing chamber inlet;
- means mounted in said reservoir for directly sensing the temperature of said liquid;
- heating elements in said housing for heating said reservoir so that liquid in said reservoir is transformed into vapor and for maintaining the temperature of said liquid responsive to said temperature sensing means;
- a heat transfer plate mounted to said housing proximate said heating elements and extending into said reservoir;
- and
- means integrally mounted to said housing and connected to said gas channel for controlling the delivery of said vapor from said reservoir to said processing chamber;
- whereby said module controllably and precisely supplies vapor at a constant, uniform and repeatable temperature from said liquid supply to said processing chamber.
Dependencies are inferred from the claim text.