Method of making electronic power device realized by a series of elementary semiconductor components connected in parallel

A method of making an electronic power device in which a plurality of elementary semiconductor power components are connected in parallel, said method comprising:

• forming a plurality of modular elementary semiconductor power components so as to be respectively contained within a plurality of semiconductor chip regions of a same semiconductor slice having opposite first and second surfaces, each of said modular elementary power components having an anode electrode, a cathode electrode and a control electrode;
• covering said first surface of said semiconductor slice with a metallic layer commonly connected to said anode electrodes of said plurality of modular elementary semiconductor power components;
• covering said plurality of semiconductor chip regions on said second surface of said semiconductor slice with a plurality of spaced apart metallic layer regions respectively connected to said cathode electrodes of said plurality of modular elementary semiconductor power components;
• forming on said second surface of said semiconductor slice a plurality of first metallic tracks respectively spaced apart from and surrounding said plurality of metallic layer regions so that each respective first metallic track is connected to the control electrode of the modular elementary semiconductor power component contained within the semiconductor chip region surrounded by the respective first metallic track;
• forming on said second surface of said semiconductor slice a plurality of second metallic tracks extending spaced apart from and between said plurality of first metallic tracks to form a lattice configuration on said second surface of said semiconductor slice;
• positioning a control pad on said second surface of said semiconductor slice and electrically connected to said plurality of second metallic tracks;
• providing a plurality of connection elements located on said second surface of said semiconductor slice so as to respectively connect each of said plurality of first metallic tracks to at least one adjacent one of said plurality of second metallic track.