Method for the construction of field oxide film in semiconductor device
AssigneeHyundai Electronics Industries Co., Ltd.
InventorSe A. Jang
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Abstract
Methods for the construction of field oxide film is disclosed. The methods facilitates the control of the length and thickness of L-shaped spacer, overcoming some difficulties in processing a semiconductor device. Thus, the stresses and defects of semiconductor substrate can be greatly diminished. In addition, the methods bring about an effect of easily achieving the separation process of semiconductor device, an essential process. Superior in suppressing Bird's beak, the methods are capable of securing more large active region in a semiconductor device.
Claims12
A method for the construction of field oxide film in a semiconductor device, comprising the steps:
- forming a nitride film over a pad oxide film overlaying a semiconductor substrate;
- etching a portion of the nitride film to a degree that the pad oxide film is not exposed, said nitride film coming to be left in a thickness in said portion;
- forming a polysilicon film over the resulting nitride film and applying spacer etch to a region included in said portion without a mask in such a way to remove the polysilicon film and the nitride film and to leave a thickness of the pad oxide film so as not to expose the semiconductor substrate;
- and
- removing the polysilicon film left after the spacer etch and forming a field oxide film.
A method for the construction of field oxide film in a semiconductor device, comprising the steps of:
- forming a nitride film over a polysilicon film atop a pad oxide film overlaying a semiconductor substrate;
- etching a portion of the nitride film to a degree that the polysilicon film is not exposed, said nitride film coming to be left in a thickness in said portion;
- forming an oxide film over the resulting nitride film and applying spacer etch to a region included in said portion without a mask in such a way to remove the oxide film and the nitride film and to leave a thickness of the polysilicon film so as not to expose the pad oxide film;
- and
- removing the oxide film left after the spacer etch and forming a field oxide film by use of thermal oxidation.
A method for the construction of field oxide film in a semiconductor device, comprising the steps of:
- forming a nitride film over a pad oxide film atop a semiconductor substrate;
- etching a portion of the nitride film to a degree that the pad oxide film is not exposed, said nitride film coming to be left in a thickness in said portion;
- forming an oxide film over the resulting nitride film and applying spacer etch to a region included in said portion in such a way to remove the oxide film and the nitride film and to leave a thickness of the pad oxide film so as not to expose the semiconductor substrate;
- and
- performing wet etch to remove at once the oxide film left after said spacer etch and the pad oxide exposed and forming a field oxide film.
A method for the construction of field oxide film in a semiconductor device, comprising the steps of:
- forming a pad oxide film, a first nitride film, a polysilicon film and a second nitride film over a semiconductor substrate, in due order;
- etching a portion of the second nitride film and polysilicon film, so as to expose the first nitride film;
- forming an oxide film over the resulting structure and applying spacer etch to a region included in said portion to remove the oxide film and the first nitride film so as to expose the pad oxide film;
- removing at once the oxide film left after said spacer etch and the exposed pad oxide and forming a field oxide film.
A method for the construction of field oxide film in a semiconductor device, comprising the steps of:
- forming a pad oxide film, a first nitride film, a first oxide film and a second nitride film over a semiconductor substrate, in due order;
- etching a portion of the second nitride film, so as to expose the first oxide film and forming a second oxide film over the resulting structure;
- applying spacer etch to a region included in said portion to remove the second oxide film, the first oxide film, and the first nitride film, in due order so as to expose the pad oxide film;
- removing at once the second oxide film left after said spacer etch and the exposed pad oxide and forming a field oxide film.
Dependencies are inferred from the claim text.