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US 5,397,212 AGranted
Robot with dust-free and maintenance-free actuators
AssigneeEbara Corporation
InventorsKatsuhide Watanabe, Yoichi Kanemitsu, Hiroyuki Shinozaki, Naoji Hiraki, Shinichi Moriyama
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Abstract
A robot with no mechanically contacting components are suitable for use in special environments such as semiconductor manufacturing processes where dust and lubrication are matters of important concern. The robot has a linear actuator composed of magnetic bearings and a linear motor for moving a robot arm linearly without mechanical contact, and a rotary actuator composed of magnetic bearings and a rotary motor for rotating a body which supports the linear actuator, around the rotary actuator without mechanical contact.
Claims6
A robot comprising:
- a robot arm comprising a hand for carrying a workpiece and an extending portion connected to the hand;
- a linear actuator for receiving said extending portion of the robot arm and comprising magnetic bearings for magnetically holding said extending portion of said robot arm without mechanical contact, and a linear motor for moving said extending portion of said robot arm linearly without mechanical contact;
- and
- a rotary actuator including magnetic bearings for magnetically holding a magnetic body supporting said linear actuator without mechanical contact, and a rotary motor for rotating said magnetic body around said rotary actuator without mechanical contact.
1 more element
Dependencies are inferred from the claim text.