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US 5,395,180 AGranted
Boron nitride vaporization vessel
AssigneeAdvanced Ceramics Corporation
InventorJohn T. Mariner
Life of this patent
Estimating the term…
Abstract
The vaporization vessel includes a body of substantially rectangular configuration having an upper relatively flat surface and a recessed cavity formed in the body with said cavity having a lateral cross sectional geometry which forms an included angle at the intersection with said substantially flat upper surface of greater than 120 degrees.
Claims7
A vaporization vessel for use in the evaporation of a metal charge comprising:
- a body having a generally rectangular geometry with a substantially flat upper surface and a recessed cavity extending into said body from said substantially flat upper surface, said cavity having a lateral cross sectional geometry with lateral walls which form an included angle with said substantially flat upper surface of above at least 120 degrees.
Dependencies are inferred from the claim text.