Method and apparatus for removable weir overflow bath system with gutter
AssigneeP.C.T. Systems, Inc.
InventorHenry R. Miranda
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AssigneeP.C.T. Systems, Inc.
InventorHenry R. Miranda
Estimating the term…
The present invention provides a method and apparatus for a removable weir overflow bath system with gutter which decreases manufacturing costs and increases user flexibility. Manufacturing costs are decreased by forming a weld with a low probability of breakage. Because breakage probability is low material costs and labor costs resulting from bath system manufacture is reduced. Furthermore, the present invention offers increased flexibility since the user need only replace the removable weir to change the scallop characteristics and obtain a new bath system. The preferred embodiment of the present invention includes a four-sided removable weir and a quartz container with gutter. The gutter region of the container is formed by welding a member of an L-shaped quartz structure to the top edge of an open top rectangular quartz container. A resilient material is placed on top of the gutter region along the corner formed by the gutter region and quartz container. The removable weir is placed on top of the resilient material. Pressure is applied to the top of the removable weir so that the resilient material conforms to and forms a seal between the sides and bottom of the removable weir and the gutter region.
A filtered bath system which comprises:
A semiconductor wafer bath system which comprises:
Dependencies are inferred from the claim text.