Method to remove fluorine residues from bond pads
AssigneeMicron Technology, Inc.
InventorsCurtis S. Jones, William J. Crane, Robin L. Gilchrist, Rod C. Langley
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Abstract
The process of the present invention comprises the addition of an adequate amount of argon gas in a dry etch system to clear bond pads of residual contaminants which form an undesired oxide coating on the bond pads. Carbon dioxide may be used as a carrier gas along with the argon gas. The process of the present invention preferably takes place in situ, following the silicon nitride pad etch in which fluorine-containing chemicals are used to form the bond pads.
Claims10
A process for removing fluorine contaminants from an aluminum-containing semiconductor bond pad, said process comprising the following steps:
- exposing the aluminum-containing bond pad to argon, the aluminum bond pad being exposed to argon in a reactive ion etcher;
- and
- applying energy to said argon, a carrier gas being added to said argon, said carrier gas being carbon dioxide, thereby removing the fluorine contaminants from the aluminum-containing bond pad.
A process for removing residual fluorine etch chemicals from an aluminum-containing bond pad, said process comprising the following steps of:
- disposing the aluminum-containing bond pad in a chamber;
- providing an atmosphere in the chamber;
- and
- creating a plasma in the chamber, said plasma comprises an inert gas, said inert gas comprising argon, said plasma further comprises oxygen, said plasma reacting with the residual fluorine chemicals, thereby removing the residual fluorine chemicals from the aluminum-containing bond pad.
A process for removing fluorine contaminants from an aluminum alloy semiconductor bond pad, said process comprising the following steps:
- exposing the aluminum alloy bond pad to argon, the aluminum alloy bond pad being exposed to argon in a reactive ion etcher, said reactive ion etcher is at 150-900 Watts and 200-600 Torr for 5 seconds to 2 minutes;
- and
- applying energy to said argon, a carrier gas being added to said argon, said carrier gas being carbon dioxide, thereby removing the fluorine contaminants from the aluminum alloy bond pad.
A process for removing residual fluorine etch chemicals from an aluminum-containing bond pad, said process comprising the following steps of:
- disposing the aluminum-containing bond pad in an chamber;
- providing an atmosphere in the chamber which has a property of removing residual fluorine chemicals from the aluminum-containing bond pad when a plasma is created in said chamber;
- and
- applying a plasma in said chamber with said atmosphere, said plasma comprises oxygen, thereby removing the residual fluorine chemicals from the aluminum-containing bond pad.
Dependencies are inferred from the claim text.