Spatial light modulator with photoconductor of hydrogenated amorphous silicon with 0.1-1.0 ppm boron

Abstract

A spatial light modulator capable of providing high contrast ratio and resolution moving pictures without an after-image effect is disclosed. The spatial light modulator comprises a pair of transparent electrodes for forming a driving electric field therebetween, and at least one photo-modulation member and a photoconductive member laminated between the pair of transparent electrodes, where the photoconductive member comprises a hydrogenated amorphous silicon film having thickness of 10 .mu.m to 30 .mu.m, and is doped with boron as such that an amount of the boron in the hydrogenated amorphous silicon film in atomic ratio with respect to silicon therein is 0.1 ppm to 1 ppm.

Dependencies are inferred from the claim text.