US 5,353,003 A · Force sensor

Abstract

A force sensor is provided which incorporates a pressure transducer disposed within a housing structure. A force transmitting means, such as a shaft slidable within an opening, is provided to communicate force from an external source to a diaphragm of a pressure sensor. An elastomeric conductor is disposed between electronic components on the diaphragm of a pressure sensor die and conductive leads that are used to communicate signals from the pressure sensor die to components external to the present invention. In certain preferred embodiments, the present invention provides a preselected quantity of resilient material between a first end of the slidable shaft and the diaphragm of the pressure sensor die. Other embodiments place the first end of the shaft in direct contact with the diaphragm. The travel of the force transmitting shaft within an opening of the housing structure can be limited either by limiting the amount of extension of the shaft outside of the housing or, alternatively, by providing a travel limit member attached to the shaft and limited in its extent of travel within the housing structure.

Claims8

Dependent claims

A force sensor, comprising:

a pressure sensitive device disposed within a housing and comprising means for providing an output signal representative of a pressure imposed on it;
means for transmitting said force to said pressure sensitive device, said transmitting means comprising a shaft slidably disposed in said housing, said shaft being moveable along a first axis and being disposed in force communicating association with said pressure sensitive device, said pressure sensitive device being a silicon device, said pressure sensitive device comprising a diaphragm which is moveable in response to pressure imposed thereon by a first end of said shaft;
a piezoresistor associated with said diaphragm to deform said piezoresistor in response to movement of said diaphragm;
and
resilient means, disposed between said diaphragm and said first end of said shaft proximate said diaphragm, for exerting pressure on said diaphragm in response to a force exerted against said second end of said shaft, said shaft extending through an opening of said housing, said second end of said shaft being external to said housing.

2 more elements

Dependencies are inferred from the claim text.

Force sensor

Life of this patent

Force sensor

Life of this patent

Abstract

Claims8