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AssigneeSextant Avionique
InventorsIsabelle Thomas, Pierre O. Lefort, Christophe Legoux
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A capacitive micro-sensor includes a sandwich of three silicon plates, each surface of the frame region of the central plate being assembled to the opposing surface of each external plate through a thin layer forming an insulating stripe. At least one of the external plates forms a first electrode, and at least one central portion of the central plate forms a variable capacity with at least one of the external plates. The frame region of the central plate is electrically disconnected from the central portion. First contact means are coupled to the frame portion. Second contact means are coupled to the central portion and form a second electrode of the variable capacity.
A capacitive micro-sensor including a sandwich of three silicon plates (1,2,3), each surface of the frame region (31) of the central plate being assembled to the opposing surface of each external plate through a thin layer forming an insulating stripe (5,6), at least one of the external plates forming a first electrode (22,23), and at least one central portion of said central plate forming a variable capacity with at least one of said external plates, wherein the frame region of said central plate is electrically disconnected from said central portion, first contact means (26) being coupled to the frame portion, and second contact means (21) being coupled to said central portion and forming a second electrode of said variable capacity.
Dependencies are inferred from the claim text.