Method for controlling plasma surface-treatments with a plurality of photodetectors and optical filters
AssigneesTokyo Electron Limited, Tokyo Electron Tohoku Kabushiki Kaisha
InventorKazutsugu Aoki
Life of this patent
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Abstract
In conducting a plurality of kinds of surface-treatments on objects to be treated, concentration of produced gases in exhaust gas discharged from a reaction vessel are detected, and data of the detected concentrations are compared with reference data stored in a control unit to continuously control and process the respective surface-treatments. As a result, processing control can be performed suitably for the respective kinds of surface-treatments, and different kinds of surface-treatments can be continuously conducted by one and the same surface-treatment device.
Claims15
A method for controlling a plurality of kinds of plasma surface-treatments in which a plurality of kinds of surface-treatments are continuously conducted on objects to be treated in a reaction vessel with plasma discharges, said method comprising the steps of:
- optically detecting, in a first one of the surface-treatments, a concentration of a produced gas generated in the first surface-treatment, which is contained in exhaust discharged from the reaction vessel;
- comparing data of the detected concentration of the produced gas with preset reference data of the first surface-treatment to control the first surface-treatment;
- optically detecting, in a second one of the surface-treatments, a concentration of a produced gas generated in the second surface-treatment, which is contained in exhaust discharged from the reaction vessel;
- and
- comparing data of the detected concentration of the produced gas with preset reference data of the second surface-treatment to control the second surface-treatment.
Dependencies are inferred from the claim text.