Device for detecting X-rays

An X-ray detector comprising:

• in order from an incidence side of radiation,
• a surface electrode layer;
• a photoelectric conversion layer;
• and
• a semiconductor detector having an electrode connected to said photoelectric conversion layer, for detecting an electric charge produced in said photoelectric conversion layer,
• wherein said photoelectric conversion layer and said surface electrode layer have thicknesses satisfying conditions
• dE.gtoreq.0.183 .lambda.X/KXE
• dF.gtoreq.0.366/(KV/.lambda.V-KX/.lambda.X)
• dF.ltoreq.0.183 .lambda.X/KX
• where dE is a thickness of the photoelectric conversion layer, dF is a thickness of the surface electrode layer, KXE is an extinction coefficient of soft X rays of a wavelength .lambda.X in a substance constituting the photoelectric conversion layer, KV is an extinction coefficient of visible light of the wavelength .lambda.V in a substance constituting the surface electrode layer, and KX is an extinction coefficient of soft X rays of the wavelength .lambda.X in a substance constituting the surface electrode layer.

A soft X-ray detector comprising:

• a solid-state image sensor having a plurality of pixels;
• a photoelectric conversion layer provided on pixel electrodes of said solid-state image sensor;
• and
• a surface electrode layer provided on said photoelectric conversion layer,
• wherein said photoelectric conversion layer is constructed of a substance having a band gap of at least 3 eV.

A soft X-ray detector comprising:

• a solid-state image sensor having a plurality of pixels;
• a photoelectric conversion layer connected to pixel electrodes of said solid-state image sensor;
• and
• a surface electrode layer provided on said photoelectric conversion layer,
• wherein said plurality of pixels of said solid-state image sensor includes two kinds of pixels having sensitivity to radiation of wavelength bands different from each other.

A soft X-ray detector comprising:

• a solid-state image sensor having a plurality of pixels;
• a photoelectric conversion layer connected to pixel electrodes of said solid-state Image sensor;
• and
• a surface electrode layer provided on said photoelectric conversion layer,
• wherein said surface electrode layer is divided into a plurality of regions corresponding to said plurality of pixels of said solid-state Image sensor, said plurality of regions Including a first class of region composed of one substance and a second class of region composed of another substance different from said one substance.

A soft X-ray detector comprising:

• a solid-state Image sensor having a plurality of pixels;
• a photoelectric conversion layer connected to pixel electrodes of said solid-state Image sensor;
• and
• a surface electrode layer provided on said photoelectric conversion layer,
• wherein a surface of said surface electrode layer is divided into a first class of region provided with a filter which corresponds to each of said plurality of pixels and which is equal In size thereto, and a second class of region from which said filter is excluded.