Monolithic high voltage nonlinear transmission line fabrication process

A process for fabricating a monolithic, high voltage, nonlinear transmission line, comprising the steps of:

• a. epitaxially growing a low doped, active, n-type layer on a heavily doped, n-plus-type substrate;
• b. epitaxially growing a heavily doped, p-type layer on said low doped, active, n-type layer;
• c. epitaxially growing a heavily doped, n-type layer on said heavily doped, p-type layer;
• d. making ohmic contacts on said heavily doped, n-type layer, thereby forming a laminated varactor diode;
• e. deactivating a designated volume of portions of each said heavily doped n-type and p-type layers and said low doped, active, n-type layer in a manner to leave independent and electrically isolated islands of laminated varactor diodes with a remaining portion of said low doped, active, n-type layer in common;
• f. depositing a nonactive and nonconductive layer within and upon said designated volume enclosing said deactivated n- and p-type layers, exclusive of the volumes above said ohmic contacts;
• and
• g. depositing a conductive layer on said nonconductive layer including and filling said volumes above said ohmic contacts.