Method of chemical vapor deposition in a continuous treatment line
AssigneeNKK Corporation
InventorsMasahiro Abe, Kazuhisa Okada, Shuzo Fukuda
Life of this patent
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Abstract
A reaction gas or a gas containing a reaction gas is blown through blowing nozzles onto a steel material in a chemical vapor deposition treating chamber at a velocity sufficient to forcibly remove reacted products from reacted surfaces of a steel material while suppressing irregular thickness of a deposited film.
Claims7
A method of chemical vapor deposition in a continuous treatment line for coating the surface of a steel material having a surface by passing it through a chemical vapor deposition treating chamber, comprising blowing a reacting as or a gas containing a reacting gas onto the steel material through blowing nozzles in the chemical vapor deposition treating chamber so as to cause chemical vapor deposition on said surface at a velocity sufficient to forcibly remove products of the reaction caused by said reacting gas from said surface of the steel material, and concurrently carrying out chemical vapor deposition thereon, including blowing the gas onto the steel material from the blowing nozzles at discharging speed V.sub.o of not less than 0.5 m/sec.
Dependencies are inferred from the claim text.